GB/T 20726-2015 English PDF (GB/T20726-2015)

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GB/T 20726-2015: Microbeam analysis -- Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis
GB/T 20726-2015
GB
NATIONAL STANDARD OF
THE PEOPLE’S REPUBLIC OF CHINA
ICS 71.040.99
G 04
GB/T 20726-2015 / ISO 15632.2012
Replacing GB/T 20726-2006
Microbeam analysis - Selected instrumental
performance parameters for the specification and
checking of energy dispersive X-ray spectrometers for
use in electron probe microanalysis
(ISO 15632.2012, IDT)
ISSUED ON. OCTOBER 9, 2015
IMPLEMENTED ON. SEPTEMBER 1, 2016
Issued by. General Administration of Quality Supervision, Inspection and
Quarantine;
Standardization Administration Committee.
Table of Contents
Foreword ... 3 
Introduction ... 4 
1 Scope ... 5 
2 Normative references ... 5 
3 Terms and definitions ... 5 
4 Requirements ... 8 
5 Check of further performance parameters ... 10 
Annex A (Normative) Measurement of line widths (FWHMs) to determine the
energy resolution of the spectrometer ... 11 
Annex B (Normative) Determination of the L/K ratio as a measure for the energy
dependence of the instrumental detection efficiency ... 16 
Bibliography ... 19 
Foreword 
This Standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This Standard replaces GB/T 20726-2006 Instrumental specification for energy
dispersive X-ray spectrometers with semiconductor detectors.
Compared with GB/T 20726-2006, the main changes are as follows.
- changed the name in Chinese language to “Microbeam analysis -
Selected instrumental performance parameters for the specification and
checking of energy dispersive X-ray spectrometers for use in electron
probe microanalysis”;
- added some terms and definitions (see 3.2, 3.2.1, 3.2.2, 3.3~3.5, 3.12,
3.13);
- modified some terms and definitions (see 3.8~3.11 if this Edition, 2.4~2.7
of 2006 Edition);
- deleted the term and definition of instrument background (see 2.8 of 2006
Edition);
- added Clause 5 “Verification of other performance parameters” (see
Clause 5);
- added necessary bibliography which contributes to understanding of this
Standard (see Bibliography).
The Chinese document which has consistency with the international normative
reference in this Standard is as follows.
- GB/T 21636-2008 Microbeam analysis - Electron Probe Micro Analysis
(EPMA) - Vocabulary (ISO 23833.2006, IDT)
This Standard was proposed by and shall be under the jurisdiction of National
Technical Committee on Microbeam Analysis of Standardization Administration
of China.
Main drafting organization of this Standard. Institute of Geology and
Geophysics of Chinese Academy of Sciences.
Main drafters of this Standard. Zeng Rongshu, Xu Wendong, Mao Qian, Ma
Yuguang.
This Standard was issued on August 1, 2007 for the first time. This is the first
revision.
Microbeam analysis - Selected instrumental
performance parameters for the specification and
checking of energy dispersive X-ray spectrometers for
use in electron probe microanalysis
1 Scope
This Standard defines the most important quantities that characterize an
energy-dispersive X-ray spectrometer consisting of a semiconductor detector,
a pre-amplifier and a signal-processing unit as the essential parts. This
Standard is only applicable to spectrometers with semiconductor detectors
operating on the principle of solid-state ionization. This Standard specifies
minimum requirements and how relevant instrumental performance parameters
are to be checked for such spectrometers attached to a scanning electron
microscope (SEM) or an electron probe microanalyser (EPMA). The procedure
used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and
is outside the scope of this Standard.
2 Normative references
The following referenced documents are indispensable for the application of
this document. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any
amendments) applies.
ISO 23833 Microbeam analysis - Electron probe microanalysis (EPMA) -
Vocabulary
3 Terms and definitions
For the purposes of this Standard, the terms and definitions given in ISO 23833
and the following apply.
NOTE With the exception of 3.1, 3.2, 3.2.1, 3.2.2, 3.11, 3.12 and 3.13, these definitions are
given in the same or analogous form in ISO 22309[2], ISO 18115-1[4] and ISO 23833.
3.1 energy-dispersive X-ray spectrometer